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半导体学报 2010
Comparison of Electron Transmittances and Tunneling Currents in an Anisotropic TiNx/HfO2/SiO2/p-Si(100) Metal-Oxide-Semiconductor (MOS) Capacitor Calculated Using Exponential- and Airy-Wavefunction Approaches and a Transfer Matrix MethodKeywords: Airy,wavefunction,Anisotropic,MOS,Exponential,wavefunction,Transmittance,Tunneling,Current. Abstract:
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