Characterization and Reliability of Thin Film Resistors for MMICs Application Based on AlGaN/GaN HEMTs
应用于AlGaN/GaN HEMTs MMIC薄膜电阻的特性与可靠性

Tantalum nitride (TaN) and nichrome (NiCr) are the two most common materials used as thin film resistors (TFR) for monolithic microwave integrated circuits (MMIC) based on AlGaN/GaN high electron mobility transistors (HEMTs).In this study,we compare the reliability of the two materials used as TFRs on a semi-insulation 4H SiC substrate.Through the comparison between NiCr and TaN thin-film resistor materials,we find the square resistor (Rs) of TaN TFR increases as the annealing temperature increases.However,...