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半导体学报 2010
Influence of hydrogenation on the dark current mechanism of HgCdTe photovoltaic detectors
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Abstract:
The influence of hydrogenation on the dark current mechanism of HgCdTe photovoltaic detectors is studied. The hydrogenation is achieved by exposing samples to a H_2/Ar plasma atmosphere that was produced during a reactive ion etching process.A set of variable-area photomask was specially designed to evaluate the hydrogenation effect. It was found that the current-voltage characteristics were gradually improved when detectors were hydrogenated by different areas.The fitting results of experimental results at...
