Enhancement of Light Extraction of LED by Photonic Crystal Structures
利用光子晶体提高InP基LED出光效率

The band structure of a 2D infinite photonic crystal is calculated using the FDTD method.Slab photonic crystals with InP are fabricated.Two fabrication methods--one using only PMMA as mask and one using PMMA and SiO2 as masks are used.The results show that the first method cannot yield an accurate pattern transfer,while the other method can.The extraction efficiency in an LED is enhanced successfully by use of the photonic crystal.The light extraction efficiency of the LED with the photonic crystal structure is twice as high as that of the unprocessed sample under the same testing conditions.Along with the increase of lattice constant,the extraction efficiency also increases.