%0 Journal Article
%T Enhancement of Light Extraction of LED by Photonic Crystal Structures<br>利用光子晶体提高InP基LED出光效率
%A Du Wei
%A Xu Xingsheng
%A Sun Zenghui
%A Lu Lin
%A Gao Junhu
%A Zhao Zhimin
%A Wang Chunxia
%A Chen Hongda
%A <br>杜伟
%A 许兴胜
%A 孙增辉
%A 鲁琳
%A 高俊华
%A 赵致民
%A 王春霞
%A 陈弘达
%J 半导体学报
%D 2006
%I 
%X The band structure of a 2D infinite photonic crystal is calculated using the FDTD method.Slab photonic crystals with InP are fabricated.Two fabrication methods--one using only PMMA as mask and one using PMMA and SiO2 as masks are used.The results show that the first method cannot yield an accurate pattern transfer,while the other method can.The extraction efficiency in an LED is enhanced successfully by use of the photonic crystal.The light extraction efficiency of the LED with the photonic crystal structure is twice as high as that of the unprocessed sample under the same testing conditions.Along with the increase of lattice constant,the extraction efficiency also increases.
%K photonic crystal
%K electron beam lithography
%K RIE
%K LED extraction efficiency<br>光子晶体
%K 电子束曝光
%K 反应离子束刻蚀
%K LED出光效率
%K 利用
%K 光子晶体
%K 出光效率
%K Structures
%K Photonic
%K Crystal
%K Extraction
%K Light
%K 晶格常数
%K 制作
%K 增强
%K 晶体结构
%K 图形质量
%K 转移
%K 制备过程
%K 刻蚀
%K 选择性
%K 情况
%K 使用
%K 结果
%K 掩模
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=F5132A9BC9633169&yid=37904DC365DD7266&vid=DB817633AA4F79B9&iid=94C357A881DFC066&sid=9BA5B7BDD4CE0596&eid=F08C87DC7855E316&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=5