A Monolithic Integrated CMOS Thermal Vacuum Sensor
单片集成CMOS电阻真空传感器

The monolithic integrated micro sensor is an important direction in the fields of integrated circuits and micro sensors.In this paper,a monolithic thermal vacuum sensor based on a micro-hotplate(MHP)and operating under constant bias voltage conditions was designed.A new monolithic integrating mode was proposed,in which the dielectric and passivation layers in standard CMOS processes were used as sensor structure layers,gate polysilicon as the sacrificial layer,and the second polysilicon layer as the sensor ...