%0 Journal Article
%T A Monolithic Integrated CMOS Thermal Vacuum Sensor<br>单片集成CMOS电阻真空传感器
%A Zhang Fengtian
%A Tang Zhen''an
%A Wang Jiaqi
%A Yu Jun
%A <br>张凤田
%A 唐祯安
%A 汪家奇
%A 余隽
%J 半导体学报
%D 2008
%I 
%X The monolithic integrated micro sensor is an important direction in the fields of integrated circuits and micro sensors.In this paper,a monolithic thermal vacuum sensor based on a micro-hotplate(MHP)and operating under constant bias voltage conditions was designed.A new monolithic integrating mode was proposed,in which the dielectric and passivation layers in standard CMOS processes were used as sensor structure layers,gate polysilicon as the sacrificial layer,and the second polysilicon layer as the sensor ...
%K thermal vacuum sensor
%K monolithic integration
%K CMOS
%K micro hotplate<br>电阻真空传感器
%K 单片集成
%K CMOS
%K 微热板
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=2BD57F135B0D42185A7FF9A6DF060C5C&yid=67289AFF6305E306&vid=771469D9D58C34FF&iid=B31275AF3241DB2D&sid=17FE7A1C78626A81&eid=DFBBF6D86DD97199&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=11