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半导体学报 2008
Structural and Optical Properties of Amorphous MCT Films Deposited by RF Magnetron Sputtering
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Abstract:
Amorphous HgCdTe(a-HgCdTe or a-MCT) films on glass substrate were deposited by RF magnetron sputtering technology.The amorphous structure of the MCT films were studied by XRD and AFM technology and the "growth window" of a-MCT was obtained.FTIR technology was used to study the optical properties of amorphous MCT films and the absorption coefficient of amorphous MCT films (~8E4cm-1) was obtained.We also observed three absorption regions near the optical gap of amorphous MCT.The optical gap of our a-MCT film is about 0.83eV.
