%0 Journal Article
%T Structural and Optical Properties of Amorphous MCT Films Deposited by RF Magnetron Sputtering
非晶态碲镉汞薄膜的射频磁控溅射生长及其结构和光学特性
%A Kong Jincheng
%A Kong Lingde
%A Zhao Jun
%A Zhang Pengju
%A Li Hongzhi
%A Li Xiongjun
%A Wang Shanli
%A Ji Rongbin
%A
孔金丞
%A 孔令德
%A 赵俊
%A 张朋举
%A 李竑志
%A 李雄军
%A 王善力
%A 姬荣斌
%J 半导体学报
%D 2008
%I
%X Amorphous HgCdTe(a-HgCdTe or a-MCT) films on glass substrate were deposited by RF magnetron sputtering technology.The amorphous structure of the MCT films were studied by XRD and AFM technology and the "growth window" of a-MCT was obtained.FTIR technology was used to study the optical properties of amorphous MCT films and the absorption coefficient of amorphous MCT films (~8E4cm-1) was obtained.We also observed three absorption regions near the optical gap of amorphous MCT.The optical gap of our a-MCT film is about 0.83eV.
%K amorphous MCT
%K RF magnetron sputtering
%K optical gap
非晶态碲镉汞
%K 射频磁控溅射
%K 光学带隙
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=9DB1F954ED79E0ACCB8291105559CEC4&yid=67289AFF6305E306&vid=771469D9D58C34FF&iid=E158A972A605785F&sid=EED44B83FAB71309&eid=FA98B938D085B826&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=19