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半导体学报 2008
Optimization of a Thermoelectric Microwave Power Sensor
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Abstract:
A 2D analytical model of the thermal distribution of a thermoelectric microwave power sensor is presented.In order to optimize the size of the sensor,the influences of various structure parameters on the thermal distribution are analyzed.The paper presents the design principle of the parameters,including the membrane thickness,the distance between the matched resistor and the hot junctions of the thermopile,and the suspended length of the thermopile,to achieve high sensitivity.The analytical results agree well with the Ansys simulative results.
