%0 Journal Article
%T Optimization of a Thermoelectric Microwave Power Sensor<br>热电式微波功率传感器的优化设计
%A Han Lei
%A Huang Qing
%A 'an
%A Liao Xiaoping
%A <br>韩磊
%A 黄庆安
%A 廖小平
%J 半导体学报
%D 2008
%I 
%X A 2D analytical model of the thermal distribution of a thermoelectric microwave power sensor is presented.In order to optimize the size of the sensor,the influences of various structure parameters on the thermal distribution are analyzed.The paper presents the design principle of the parameters,including the membrane thickness,the distance between the matched resistor and the hot junctions of the thermopile,and the suspended length of the thermopile,to achieve high sensitivity.The analytical results agree well with the Ansys simulative results.
%K thermoelectric
%K microwave power
%K analytical model
%K 2D thermal distribution<br>热电式
%K 微波功率
%K 解析模型
%K 二维热分布
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=EA4E0071F2B6C2B3C5026F2BEC0CD53D&yid=67289AFF6305E306&vid=771469D9D58C34FF&iid=E158A972A605785F&sid=7B927C26AC9ED104&eid=8225A9F184D4F1CA&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=9