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半导体学报 2008
259W QCW Al-Free 808nm Linear Laser Diode Arrays
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Abstract:
Through optimizing the tensile-strained single quantum well(SQW)epitaxial structure and introducing double-channel deep isolation groove etching technologies of linear laser diode arrays,GaAsP/GaInP/AlGaInP SQW separate confinement laser emitting structures are grown by low-pressure metal organic chemical vapor deposition and 1cm-wide laser bars with 50% fill factor are fabricated.The cross sections of the channels are analyzed using scanning electron microscope.Mounted on passively cooled copper heat sinks...