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Detailed Routing Algorithm with Optical Proximity Effects Constraint
考虑光学邻近效应的详细布线算法

Keywords: optical proximity effect,detailed routing,Steiner tree,yield
光学邻近效应校正
,详细布线,Steiner树,成品率,optical,proximity,effect,detailed,routing,Steiner,tree,yield

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Abstract:

We present a detailed routing algorithm considering the optical proximity effect.The light intensity is calculated beforehand and stored in look-up tables.These costs are used as a constraint to guide the sequential routing.The routing algorithm is based on constructed force directed Steiner tree routing to enhance routing efficiency.Experimental results on industrial benchmark circuits show that the presented routing algorithm can obtain much improvement considering optical effects short runtime.

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