%0 Journal Article
%T Detailed Routing Algorithm with Optical Proximity Effects Constraint<br>考虑光学邻近效应的详细布线算法
%A Zhou Qiang
%A Cai Yici
%A Zhang Wei
%A Hong Xianlong
%A <br>周强
%A 蔡懿慈
%A 张为
%A 洪先龙
%J 半导体学报
%D 2007
%I 
%X We present a detailed routing algorithm considering the optical proximity effect.The light intensity is calculated beforehand and stored in look-up tables.These costs are used as a constraint to guide the sequential routing.The routing algorithm is based on constructed force directed Steiner tree routing to enhance routing efficiency.Experimental results on industrial benchmark circuits show that the presented routing algorithm can obtain much improvement considering optical effects short runtime.
%K optical proximity effect
%K detailed routing
%K Steiner tree
%K yield<br>光学邻近效应校正
%K 详细布线
%K Steiner树
%K 成品率
%K optical
%K proximity
%K effect
%K detailed
%K routing
%K Steiner
%K tree
%K yield
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=C7C74D1FD09E7648&yid=A732AF04DDA03BB3&vid=D3E34374A0D77D7F&iid=0B39A22176CE99FB&sid=3A0155B37D8FF829&eid=64963996248CBF47&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=12