Design of a Silicon Beam Resonator for a Novel Gas Sensor

A new silicon beam resonator design for a novel gas sensor based on simultaneous conductivity and mass change measurement is investigated.High selectivity and sensitivity in gas detection can be obtained by measuring the charge-to-mass ratio of gas molecules.Structures of silicon beam resonators are designed,simulated,and optimized.This gas sensor is fabricated using sacrificial layer microelectronmechanical system technology,and the resonant frequency of the microbeam is measured.