%0 Journal Article
%T Design of a Silicon Beam Resonator for a Novel Gas Sensor
%A Hao Yilong
%A Xu Jiaji
%A Zhang Guobing
%A Wu Guoying
%A Yan Guizhen
%A <br>Hao Yilong
%A Xu Jiaji
%A Zhang Guobing
%A Wu Guoying
%A Yan Guizhen
%J 半导体学报
%D 2006
%I 
%X A new silicon beam resonator design for a novel gas sensor based on simultaneous conductivity and mass change measurement is investigated.High selectivity and sensitivity in gas detection can be obtained by measuring the charge-to-mass ratio of gas molecules.Structures of silicon beam resonators are designed,simulated,and optimized.This gas sensor is fabricated using sacrificial layer microelectronmechanical system technology,and the resonant frequency of the microbeam is measured.
%K MEMS
%K micro gas sensor
%K charge-to-mass ratio
%K sacrificial layer technology<br>MEMS
%K 气体传感器
%K 荷质比
%K 牺牲层工艺
%K MEMS
%K micro
%K gas
%K sensor
%K charge-to-mass
%K ratio
%K sacrificial
%K layer
%K technology
%K 悬臂梁
%K 谐振器
%K 气体传感器
%K Gas
%K Sensor
%K Novel
%K Resonator
%K Beam
%K Silicon
%K resonant
%K frequency
%K microbeam
%K sacrificial
%K layer
%K system
%K technology
%K simulated
%K Structures
%K High
%K selectivity
%K sensitivity
%K gas
%K detection
%K measuring
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=23991313AC2177CC&yid=37904DC365DD7266&vid=DB817633AA4F79B9&iid=E158A972A605785F&sid=4E8E6A5CE04FD382&eid=8DDBA6455F2E3ECF&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=5