Fluid model of inductively coupled plasma etcher based on COMSOL
基于COMSOL的感应耦合等离子体刻蚀机流体模型

Fluid dynamic models are generally appropriate for the investigation of inductively coupled plasmas.A commercial ICP etcher filled with argon plasma is simulated in this study.The simulation is based on a multiphysical software,COMSOL~(TM),which is a partial differential equation solver.Just as with other plasma fluid models,there are drift-diffusion approximations for ions,the quasi-neutrality assumption for electrons movements,reduced Maxwell equations for electromagnetic fields,electron energy equations ...