%0 Journal Article
%T Fluid model of inductively coupled plasma etcher based on COMSOL<br>基于COMSOL的感应耦合等离子体刻蚀机流体模型
%A Cheng Ji
%A Ji Linhong
%A Zhu Yu
%A Shi Yixiang
%A <br>程嘉
%A 季林红
%A 朱煜
%A 史翊翔
%J 半导体学报
%D 2010
%I 
%X Fluid dynamic models are generally appropriate for the investigation of inductively coupled plasmas.A commercial ICP etcher filled with argon plasma is simulated in this study.The simulation is based on a multiphysical software,COMSOL~(TM),which is a partial differential equation solver.Just as with other plasma fluid models,there are drift-diffusion approximations for ions,the quasi-neutrality assumption for electrons movements,reduced Maxwell equations for electromagnetic fields,electron energy equations ...
%K inductively coupled plasma
%K simulation
%K COMSOL<br>感应耦合等离子体
%K 模拟
%K COMSOL
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=53478EBA23CDD6CD910268C4CC089287&yid=140ECF96957D60B2&vid=4AD960B5AD2D111A&iid=38B194292C032A66&sid=1510E04E8C00AD5B&eid=B31275AF3241DB2D&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=0