Characterization and Modeling of Finite-Ground Coplanar Waveguides in 0. 13μm CMOS
Characterization and Modeling of Finite-Ground Coplanar Waveguides in 0.13μm CMOS

Keywords: coplanar waveguide,CMOS,S-parameter
共面波导,CMOS,散射参数,coplanar,waveguide,CMOS,S-parameter,CMOS,process,接地板,宽度,有限,共面波导,特性,建模,Coplanar,Waveguides,Modeling,distributed,parameters,technique,analyzer,propagation,constant,frequency,range,coplanar,waveguides,libraries,values,characteristic,impedance,loss

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Abstract:

讨论了利用TSMC 0.13μm CMOS工艺实现的共面波导的特性及其建模.通过Momentum等电磁场仿真软件计算了传输线的基本参数,例如特征阻抗和衰减常数.并设计了特征阻抗分别为30,50,70和100Ω的共面波导传输线元件库.最后,在0.1～40GHz的范围内利用网络分析仪和SOLT(short-open-load-thru)测试技术测得特征阻抗和衰减常数,共面波导的分布参数则通过提取测试得到的S参数得到.

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