%0 Journal Article
%T Characterization and Modeling of Finite-Ground Coplanar Waveguides in 0. 13μm CMOS<br>Characterization and Modeling of Finite-Ground Coplanar Waveguides in 0.13μm CMOS
%A Chen Xu
%A Wang Zhigong
%A <br>Chen Xu
%A Wang Zhigong
%J 半导体学报
%D 2006
%I 
%X 讨论了利用TSMC 0.13μm CMOS工艺实现的共面波导的特性及其建模.通过Momentum等电磁场仿真软件计算了传输线的基本参数,例如特征阻抗和衰减常数.并设计了特征阻抗分别为30,50,70和100Ω的共面波导传输线元件库.最后,在0.1～40GHz的范围内利用网络分析仪和SOLT(short-open-load-thru)测试技术测得特征阻抗和衰减常数,共面波导的分布参数则通过提取测试得到的S参数得到.
%K coplanar waveguide
%K CMOS
%K S-parameter<br>共面波导
%K CMOS
%K 散射参数
%K coplanar
%K waveguide
%K CMOS
%K S-parameter
%K CMOS
%K process
%K 接地板
%K 宽度
%K 有限
%K 共面波导
%K 特性
%K 建模
%K Coplanar
%K Waveguides
%K Modeling
%K distributed
%K parameters
%K technique
%K analyzer
%K propagation
%K constant
%K frequency
%K range
%K coplanar
%K waveguides
%K libraries
%K values
%K characteristic
%K impedance
%K loss
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=2F58019EC34BF778&yid=37904DC365DD7266&vid=DB817633AA4F79B9&iid=B31275AF3241DB2D&sid=7D89C25BE291E00C&eid=54D3D9B69F1CCE77&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=13