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半导体学报 2001
2-Dimensional Analysis of Surface Electric Field Profile of Planar Junction with Single-Step Field-Plate Termination Structure
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Abstract:
Based on Poisson Equation,an analytical model is proposed for the 2 dimensional surface electric field profile of the planar junction with a single step filed plate structure for the first time.The dependence on the doping concentration,field plate thickness and length of the surface electric field profile has been analyzed.The calculated breakdown voltages show good agreement with the previous numerical results.The presented analytical model is especial useful in design of the filed plate termination of the power devices and SPIC.
