%0 Journal Article
%T 2-Dimensional Analysis of Surface Electric Field Profile of Planar Junction with Single-Step Field-Plate Termination Structure<br>平面结场板结构表面场分布的二维解析
%A 何进
%A 张兴
%A 黄如
%A 王阳元
%J 半导体学报
%D 2001
%I 
%X Based on Poisson Equation,an analytical model is proposed for the 2 dimensional surface electric field profile of the planar junction with a single step filed plate structure for the first time.The dependence on the doping concentration,field plate thickness and length of the surface electric field profile has been analyzed.The calculated breakdown voltages show good agreement with the previous numerical results.The presented analytical model is especial useful in design of the filed plate termination of the power devices and SPIC.
%K planar junction
%K field plate termination
%K surface field
%K breakdown voltage<br>平面结
%K 场板结构
%K 电场分布
%K 击穿电压
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=34F244DDA0F4EC14&yid=14E7EF987E4155E6&vid=BC12EA701C895178&iid=DF92D298D3FF1E6E&sid=BD77137A0285B6FF&eid=C45B504FED793340&journal_id=1674-4926&journal_name=半导体学报&referenced_num=2&reference_num=11