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半导体学报 2001
Modeling of Subthreshold Characteristics of Deep-Submicrometer FD Devices
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Abstract:
A third order quasi cubic silicon film potential function in the vertical direction is assumed for FD SOI device,and the surface potential formula is obtained via solving the two dimensional Poisson equation in the subthreshold region.The surface potential model in the deep submicrometer FD device is presented by introducting some new parameters to describe the DIBL effect.Based on it,a drain current model in the subthreshold region is developed,which can predict the accurate subthreshold drain current characteristics.The models are verified by comparing with the two dimensional device simulator,MEDICI.