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半导体学报 1990
Temperature Distribution of Full-Thermal path of VDMOS
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Abstract:
An electronic model of the full-thermal path of VDMOS is proposed and the temperaturedistribution of the device including active region, substrate,support and heat sink is calculatedby the electric network method.On the other hand, the approach taken in the paper is tosolve a complete set of partial differential equations governing the device behavior understeady-state operation and nonisothermal conditions. The results from the two approaches arein excellent agreement.
