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半导体学报 2008
A Novel Back-Gate Kink Effect in SOI MOSFETs During Ionizing Irradiation
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Abstract:
Total dose irradiation effects of partially depleted SOI MOSFETs are studied under 10keV X-ray exposure.Results show that the front-gate characteristics do not change significantly during irradiation.An anomalous kink is observed in the back-gate logarithmic curve of both nMOS and pMOS,which is attributed to charged traps at the buried oxide/top silicon (BOX/SOI) interface during irradiation.Two-dimensional numerical simulation using MEDICI supports this conclusion.