An Improved Model and Temperature Sensitivity Analysis of a Capacitive Absolute Pressure Sensor
电容式绝对压力传感器的改进模型及温度特性分析

An improved model of capacitive abosolute pressure sensors is presented based on the model for pressure-sensing membrane of pressure sensor,and the effect of the sensor performance due to residual gas in the sealed cavities when temperature changes is considered.From the improved model we can get that the change of temperature leads to the change of pressure of the residual gas,which will cause the offset of temperature to the measurement of the sensor,and the sensibility will be reduced at the same time.Based on that,we calculate the amount of the offset of temperature in measurement of sensor and the coefficient of sensitivity when residual gas exists.These results will guide the improvement of technology and design of the subsequent circuit.