%0 Journal Article
%T An Improved Model and Temperature Sensitivity Analysis of a Capacitive Absolute Pressure Sensor<br>电容式绝对压力传感器的改进模型及温度特性分析
%A Liu Na
%A Huang Qingan
%A Qin Ming
%A Zhou Minxin
%A <br>刘娜
%A 黄庆安
%A 秦明
%A 周闵新
%J 半导体学报
%D 2005
%I 
%X An improved model of capacitive abosolute pressure sensors is presented based on the model for pressure-sensing membrane of pressure sensor,and the effect of the sensor performance due to residual gas in the sealed cavities when temperature changes is considered.From the improved model we can get that the change of temperature leads to the change of pressure of the residual gas,which will cause the offset of temperature to the measurement of the sensor,and the sensibility will be reduced at the same time.Based on that,we calculate the amount of the offset of temperature in measurement of sensor and the coefficient of sensitivity when residual gas exists.These results will guide the improvement of technology and design of the subsequent circuit.
%K capacitive absolute pressure sensor
%K improved model
%K residual gas
%K offset of temperature
%K sensibility<br>电容式绝对压力传感器
%K 改进模型
%K 残余气体
%K 温度漂移
%K 灵敏度
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=99BA1B440A64CF40&yid=2DD7160C83D0ACED&vid=96C778EE049EE47D&iid=DF92D298D3FF1E6E&sid=01471B003B2963CC&eid=A126866E01788114&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=6