An Equivalent Circuit Macromodel for a MEMS Beam and F-I Analogy
F-I类比方法及MEMS梁的等效电路宏模型

An equivalent circuit macromodel for beam-structure electromechanical systems is presented with force-current (F-I) analogy.It is appropriate for small-signal time and frequency domain analysis.Compared with the existing macormodel of force-voltage (F-V) analogy,the macromodel of F-I analogy has the advantage that the topology of the electric network of a F-I analogy macromodel is similar to that of the original mechanical network.So it is very convenient to create an equivalent circuit macromedel for a complicated MEMS in F-I analogy.Simulation results show that the macromodel of F-I analogy has better accuracy.