%0 Journal Article
%T An Equivalent Circuit Macromodel for a MEMS Beam and F-I Analogy<br>F-I类比方法及MEMS梁的等效电路宏模型
%A Rong Hua
%A Huang Qing''''an
%A Li Weihua
%A <br>戎华
%A 黄庆安
%A 李伟华
%J 半导体学报
%D 2003
%I 
%X An equivalent circuit macromodel for beam-structure electromechanical systems is presented with force-current (F-I) analogy.It is appropriate for small-signal time and frequency domain analysis.Compared with the existing macormodel of force-voltage (F-V) analogy,the macromodel of F-I analogy has the advantage that the topology of the electric network of a F-I analogy macromodel is similar to that of the original mechanical network.So it is very convenient to create an equivalent circuit macromedel for a complicated MEMS in F-I analogy.Simulation results show that the macromodel of F-I analogy has better accuracy.
%K equivalent circuit macromodel
%K F-I analogy
%K modal analysis
%K Lagrange's equation<br>等效电路宏模型
%K F-I类比
%K 模态分析
%K 拉格朗日方程
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=AE740B6B29F18977&yid=D43C4A19B2EE3C0A&vid=B91E8C6D6FE990DB&iid=94C357A881DFC066&sid=652E7E360EBE3082&eid=FF58680609C9D068&journal_id=1674-4926&journal_name=半导体学报&referenced_num=1&reference_num=14