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半导体学报 2001
A New Lifetime Prediction Model for n-MOSFETs with Ultrathin Gate Oxides Under Hot-Carrier Stress
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Abstract:
Hot carrier degradation of n MOSFETs under V g=V d stress mode is examined.A new lifetime prediction model electron fluence model is developed based on the universal power law between the degradation of saturated drain current (dI dsat ) and the product of the injected charge fluence times the gate current,which is independent of gate or drain voltages.This model applies to n MOSFETs with ultrathin gate oxides.The lifetime can be estimated under the operation conditions.