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半导体学报 1990
Three Pulse DLTS Method Proposed to Eliminate the Edge Region Effect and its Applications to the Measurements of DX-Centers Capture Barriers of
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Abstract:
The authors developed a new method-Three Pulse DLTS method-for the measurementof the capture cross-section of deep levels. The effect of edge region can be eliminatedWe have also meaured the capture cross-section of the DX-center in Al_x Ca_(1-x)As:Si sampleswith different Al mole fraction x by the method and have got some satisfied results aidedby computer regression process in which,the high concentrations of deep center have beentaken into account.