Effect of High Aluminum AlGaAs Oxidized Layers on Vertical-Cavity Surface-Emitting Lasers
高铝Al_xGa_(1-x)As氧化层对垂直腔面发射激光器的影响

The characterization of high Al containing AlGaAs oxidized layers and the compressive strain effect of oxide layer on the active region are discussed for the fabrication of visible vertical cavity surface emitting lasers (VCSEL) by wet oxidation and micro photoluminescence spectrum measurement respectively.The optimal position and Al mole fraction of oxide layer are presented.AlGaInP VCSELs with low threshold current are fabricated successfully.