%0 Journal Article
%T Effect of High Aluminum AlGaAs Oxidized Layers on Vertical-Cavity Surface-Emitting Lasers<br>高铝Al_xGa_(1-x)As氧化层对垂直腔面发射激光器的影响
%A Kang Xiangning
%A Song Guofeng
%A Ye Xiaojun
%A Hou Shihua
%A Chen Lianghui
%A <br>康香宁
%A 宋国峰
%A 叶晓军
%A 侯识华
%A 陈良惠
%J 半导体学报
%D 2004
%I 
%X The characterization of high Al containing AlGaAs oxidized layers and the compressive strain effect of oxide layer on the active region are discussed for the fabrication of visible vertical cavity surface emitting lasers (VCSEL) by wet oxidation and micro photoluminescence spectrum measurement respectively.The optimal position and Al mole fraction of oxide layer are presented.AlGaInP VCSELs with low threshold current are fabricated successfully.
%K Al
%K x Ga 1-
%K x
%K As wet oxidation
%K micro photoluminescence
%K VCSEL<br>AlxGa1-xAs湿氮选择氧化
%K 微区光致发光谱
%K 垂直腔面发射激光器
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=E62406BAF7B152A4&yid=D0E58B75BFD8E51C&vid=C5154311167311FE&iid=94C357A881DFC066&sid=4081E94A71AB3C30&eid=2EAE52BA5B1222A9&journal_id=1674-4926&journal_name=半导体学报&referenced_num=4&reference_num=12