X-Ray Double-Crystal Diffraction Study of In_xGa_(1-x)As/GaAs Strained-Layer Superlattice
In_xGa_(1-x)As/GaAs应变超晶格的X射线双晶衍射研究

A computer simulation method based on X-ray dynamical diffraction theory is presented.The method is used for the analysis of X-ray double-crystal rocking curves of superlattices,The structure parameters of the In_xGa_(1-x)As/GaAs strained-layer superlattice is obtained fromthe simulation of the rocking-curve.