%0 Journal Article
%T X-Ray Double-Crystal Diffraction Study of In_xGa_(1-x)As/GaAs Strained-Layer Superlattice<br>In_xGa_(1-x)As/GaAs应变超晶格的X射线双晶衍射研究
%A Chen Jingyi/
%A <br>陈京一
%A 朱南昌
%A 田亮光
%A 李润身
%J 半导体学报
%D 1990
%I 
%X A computer simulation method based on X-ray dynamical diffraction theory is presented.The method is used for the analysis of X-ray double-crystal rocking curves of superlattices,The structure parameters of the In_xGa_(1-x)As/GaAs strained-layer superlattice is obtained fromthe simulation of the rocking-curve.
%K Strained-layer superlattice
%K Double-crystal diffraction
%K Dynamical diffraction theory
%K Computer simulation
%K Rocking curve
%K Structure parameters<br>InGaAs／GaAs
%K 超晶格
%K 双晶衍射
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=8B386B0A18766F38BC174A4B7EAA09E0&yid=8D39DA2CB9F38FD0&vid=708DD6B15D2464E8&iid=708DD6B15D2464E8&sid=466EAEA150F7AE77&eid=9596F7248FB5796B&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=3