Silicon Force Sensor with Cross Beams
硅十字梁单块力传感器

An analysis of sensitivity is presented for a silicon force sensor with cross beams.Forcesensors with high sensitivity,small drift to tempreture and low cost can be fabricated by usingthis kind of structure.The sensors for four different ranges are fabricated under the guide ofthe analysis.The highest sensitivity of the sensois is approximately 340 mv/10g. It is suitablefor the measement of weak force, and it also has a special structure to resist over range force.