%0 Journal Article
%T Silicon Force Sensor with Cross Beams<br>硅十字梁单块力传感器
%A Wang Yan/
%A <br>王言
%A 王毕南
%A 晋琦
%A 鲍敏杭
%J 半导体学报
%D 1990
%I 
%X An analysis of sensitivity is presented for a silicon force sensor with cross beams.Forcesensors with high sensitivity,small drift to tempreture and low cost can be fabricated by usingthis kind of structure.The sensors for four different ranges are fabricated under the guide ofthe analysis.The highest sensitivity of the sensois is approximately 340 mv/10g. It is suitablefor the measement of weak force, and it also has a special structure to resist over range force.
%K silicon
%K transducer
%K force
%K sensor<br>硅
%K 传感器
%K 力传感器
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=B0EA35ADCCB6E60A&yid=8D39DA2CB9F38FD0&vid=708DD6B15D2464E8&iid=94C357A881DFC066&sid=315A3D008C6ECFC8&eid=9EF602EA28138BEA&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=3