New Method of Quality Controlling of LED Epi-Wafers
发光二极管外延片质量控制的新方法

Method of indestructible examination and quality controlling of GaP LED epi wafers by a new photoluminescence mapping system is presented.The suggestions to improve the wafer production technique are educed from statistical analysis of the examination result.The improvement of GaP LED epi wafers' quality is realized by this method.