%0 Journal Article
%T New Method of Quality Controlling of LED Epi-Wafers<br>发光二极管外延片质量控制的新方法
%A Su Zhe
%A Dong Zhanmin
%A Han Li
%A Chen Haoming
%A <br>苏哲
%A 董占民
%A 韩立
%A 陈浩明
%J 半导体学报
%D 2002
%I 
%X Method of indestructible examination and quality controlling of GaP LED epi wafers by a new photoluminescence mapping system is presented.The suggestions to improve the wafer production technique are educed from statistical analysis of the examination result.The improvement of GaP LED epi wafers' quality is realized by this method.
%K epi
%K wafer
%K photoluminescence
%K indestructible examination<br>外延片
%K 光致发光
%K 无损检测
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=353A8ADC166E62E1&yid=C3ACC247184A22C1&vid=EA389574707BDED3&iid=59906B3B2830C2C5&sid=73839ECFB80A3712&eid=F8085F090F1A1511&journal_id=1674-4926&journal_name=半导体学报&referenced_num=3&reference_num=4