An Efficient Boundary Generation Method for Arbitrary Complex Structures in Parasitic Capacitance Extraction
一种可适应复杂互连电容结构的边界元形体处理方法

For the complex interconnect structures in the integrated circuits,an efficient method is proposed to process the geometric objects in the capacitance extraction using the boundary element method.In the method,a multiple tree is used to store the three-dimensional objects,and the boundaries of medium regions are efficiently generated.Because of the advantage of the data organization and boundary generation algorithm,the BEM becomes capable of handling the complex capacitor with structures including an air gap,conformal dielectric,multi-plane dielectric,and even arbitrary complex structures.Numerical experiment reveals that this method greatly extends the ability of the boundary element method for handling complex structure,and it is also of high efficiency.