%0 Journal Article
%T An Efficient Boundary Generation Method for Arbitrary Complex Structures in Parasitic Capacitance Extraction<br>一种可适应复杂互连电容结构的边界元形体处理方法
%A Yu Wenjian
%A Wang Zeyi
%A Wang Yugang
%A Lu Taotao
%A Chen Ruiming
%A <br>喻文健
%A 王泽毅
%A 王玉刚
%A 陆涛涛
%A 陈瑞明
%J 半导体学报
%D 2004
%I 
%X For the complex interconnect structures in the integrated circuits,an efficient method is proposed to process the geometric objects in the capacitance extraction using the boundary element method.In the method,a multiple tree is used to store the three-dimensional objects,and the boundaries of medium regions are efficiently generated.Because of the advantage of the data organization and boundary generation algorithm,the BEM becomes capable of handling the complex capacitor with structures including an air gap,conformal dielectric,multi-plane dielectric,and even arbitrary complex structures.Numerical experiment reveals that this method greatly extends the ability of the boundary element method for handling complex structure,and it is also of high efficiency.
%K parasitic capacitance
%K complex interconnect structure
%K boundary element method
%K geometry processing<br>寄生电容
%K 复杂互连结构
%K 边界元法
%K 形体处理
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=971C0A42A6BC0447&yid=D0E58B75BFD8E51C&vid=C5154311167311FE&iid=0B39A22176CE99FB&sid=797D49279EA93BC4&eid=1D67BE204FBF4800&journal_id=1674-4926&journal_name=半导体学报&referenced_num=3&reference_num=9