Study on Surface Recombination Velocity and Diffusion Length in Semiconductors by Microwave Photoconductivity Spectrum
用微波光电导谱研究半导体薄片的少子扩散长度和表面复合速度

When semiconductor wafer is illuminated by microwave and light, the microwave transmission coefficient (MTC) is related to the wavelength of light.We have theoretically analysised the relationship among the MTC, the diffusion length, the lifetime of minority carrier and the surface recombination velocity.It is possible to obtain all these parameters through the microwave photoconductivity spectrum (MPCS).We have measured the MTC at different light wavelength using contactless method. The measuring area is a circular spot of about 7mm~2.