%0 Journal Article
%T Study on Surface Recombination Velocity and Diffusion Length in Semiconductors by Microwave Photoconductivity Spectrum
用微波光电导谱研究半导体薄片的少子扩散长度和表面复合速度
%A Chu Youling/Fudan University
%A Shanghai Wang Zongxin/Fudan University
%A Shanghai Liu Ruilin/Fudan University
%A Shanghai Zuo Wende/Fudan University
%A Shanghai
%A
褚幼令
%A 王宗欣
%A 刘瑞林
%A 左文德
%J 半导体学报
%D 1990
%I
%X When semiconductor wafer is illuminated by microwave and light, the microwave transmission coefficient (MTC) is related to the wavelength of light.We have theoretically analysised the relationship among the MTC, the diffusion length, the lifetime of minority carrier and the surface recombination velocity.It is possible to obtain all these parameters through the microwave photoconductivity spectrum (MPCS).We have measured the MTC at different light wavelength using contactless method. The measuring area is a circular spot of about 7mm~2.
%K Microwave
%K Photoconductivity spectrum
%K Diffusion length
%K Recombination velocity
%K Contactless
半导体薄片
%K 光电导谱
%K 扩散长度
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=DFE678322F5EEE27&yid=8D39DA2CB9F38FD0&vid=708DD6B15D2464E8&iid=F3090AE9B60B7ED1&sid=8A6D8366EA57F0FF&eid=3D8AB54CA690066A&journal_id=1674-4926&journal_name=半导体学报&referenced_num=1&reference_num=4