Analysis of Micromachined Cantilevers in Transverse Shock
微加工悬臂梁在横向冲击下的响应分析

The response of the micromachined cantilever to the transverse shock is analyzed by taking it as a distributed-parameter system.The displacements and stresses of the cantilever are formulated with the mode superposition method.The possible failure modes are estimated by the maximum displacements and stresses,therefore the reliability designs of MEMS can be improved.