%0 Journal Article
%T Analysis of Micromachined Cantilevers in Transverse Shock<br>微加工悬臂梁在横向冲击下的响应分析
%A Fang Xuwen
%A Tang Jieying
%A Huang Qing''''an
%A <br>方绪文
%A 唐洁影
%A 黄庆安
%J 半导体学报
%D 2005
%I 
%X The response of the micromachined cantilever to the transverse shock is analyzed by taking it as a distributed-parameter system.The displacements and stresses of the cantilever are formulated with the mode superposition method.The possible failure modes are estimated by the maximum displacements and stresses,therefore the reliability designs of MEMS can be improved.
%K MEMS
%K cantilever
%K shock
%K distributed parameter<br>MEMS
%K 悬臂梁
%K 冲击
%K 分布参数
%K 微加工
%K 悬臂梁
%K 横向冲击
%K 响应分析
%K Shock
%K 可靠性设计
%K 器件
%K MEMS
%K 失效模式
%K 判断
%K 最大值
%K 应力分布
%K 位移
%K 计算
%K 模态叠加法
%K 利用
%K 分布参数系统
%K 质量
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=DFA7B212CEB557CC&yid=2DD7160C83D0ACED&vid=96C778EE049EE47D&iid=0B39A22176CE99FB&sid=9EF602EA28138BEA&eid=05340B75C67FF664&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=12