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半导体学报 2000
Sub-Microscale Temperature Distributions Measured by Scanning Thermal Microscopy
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Abstract:
On the basis of thermal resistance network model,the heat conduction mechanism of a resistive\|type thermal probe is analyzed. It is demonstrated that not only the temperature distribution,but also the thermal conductivity of the sample surface can be mapped in a passive mode. Thermal bridge and semiconductor laser are investigated by combining both STM and AFM.