An Analytical Model for Pull-in Voltage of Doubly-Clamped Multi-Layer Beams
两端固支多层梁吸合电压的解析模型

The relationship between applied voltage and deflection of the beams at pull in state is analyzed using the energy method.Two equations about normalized displacement and pull in voltage are developed.The obtained equations are verified by the CoSolveEM module in Coventor.Comparing the results for the analytical equations and those for Coventor shows that they agree with each other.