%0 Journal Article
%T An Analytical Model for Pull-in Voltage of Doubly-Clamped Multi-Layer Beams<br>两端固支多层梁吸合电压的解析模型
%A Rong Hua
%A Huang Qing'an
%A Nie Meng
%A Li Weihua
%A <br>戎华
%A 黄庆安
%A 聂萌
%A 李伟华
%J 半导体学报
%D 2003
%I 
%X The relationship between applied voltage and deflection of the beams at pull in state is analyzed using the energy method.Two equations about normalized displacement and pull in voltage are developed.The obtained equations are verified by the CoSolveEM module in Coventor.Comparing the results for the analytical equations and those for Coventor shows that they agree with each other.
%K doubly
%K clamped multi layer beam
%K energy method
%K deflection
%K pull
%K in<br>两端固支多层梁
%K 能量法
%K 挠度
%K 吸合
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=FEC62AA36B7A7E72&yid=D43C4A19B2EE3C0A&vid=B91E8C6D6FE990DB&iid=708DD6B15D2464E8&sid=38FD6970749494EF&eid=C9D6A9952042973F&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=9