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半导体学报 1990
Polysilicon-Diaphragm pressure Sensors
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Abstract:
The fabrication techniques for polysilicon-diaphragm pressure sensors were studied.The process conditions for making undeformed polysilicon-diaphragm were suggested, and polysilicon -diaphragm pressure sensors were made. The technology is simple, and has better process compatibility with current IC technology. Therefore, it sutits to the fabrication of integrated pressure sensors.
