%0 Journal Article
%T Polysilicon-Diaphragm pressure Sensors<br>多晶硅应变膜压力传感器
%A Wang Yaolin/Institute of Microelectronics
%A Tsinghua University
%A Beijing Liu Litian/Institute of Microelectronics
%A Tsinghua University
%A Beijing Zheng Xinyu/Institute of Microelectronics
%A Tsinghua University
%A Beijing Li Zhijian/Institute of Microelectronics
%A Tsinghua University
%A Beijing
%A <br>王跃林
%A 刘理天
%A 郑心畲
%A 李志坚
%J 半导体学报
%D 1990
%I 
%X The fabrication techniques for polysilicon-diaphragm pressure sensors were studied.The process conditions for making undeformed polysilicon-diaphragm were suggested, and polysilicon -diaphragm pressure sensors were made. The technology is simple, and has better process compatibility with current IC technology. Therefore, it sutits to the fabrication of integrated pressure sensors.
%K Pressure sensor
%K Polysilicon
%K Annealing<br>压力传感器
%K 多晶硅
%K 应变膜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=BCC68FA8799306E3&yid=8D39DA2CB9F38FD0&vid=708DD6B15D2464E8&iid=9CF7A0430CBB2DFD&sid=D02611D1F8166C9A&eid=780091CB32840698&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=1